Model 10

Precision Bake Plate
Apogee<sup>™</sup> Precision Bake Plate

The Cee® Model 10 bake plate is designed for process and R&D engineers requiring a bake plate for large- area substrate applications. The Model 10 bake plate also has capability for 300-mm or 14-in square (maximum) substrates. This tool provides the user with repeatable thermal performance in a robust system design for years of reliable operation.

Operation

  • Pneumatic lift pin option (load/unload) standard
  • Removable fixed proximity standoffs
  • Contact or fixed proximity bake methods (standard)
  • Vacuum and proximity bake for 200- and 300-mm wafers
  • Optional custom bake plate surfaces available upon request

Dimensions

  • Cabinet Dimensions: 18.75" L x 18.75" W x 9.5" H
  • Machine weight: 77 lbs
  • Shipping weight: 210 lbs

Programmability

  • Dual 4-digit alphanumeric LED display
  • Full PID operation
  • Temperature auto-tuning capable
  • Security: password protection available at no charge
  • Optional ramping capability (8 specific set points)

Precision

  • Substrate Sizes: < 1cm to 300 mm round; 14 in x 14 in square
  • Temperature resolution: 0.1°C
  • Temperature range: ambient to 300°C (400°C optional)
  • Temperature uniformity: ± 0.3% across working surface

Reliability

  • Industry leading reliability and up-time
  • 1-year full warranty parts and labor
  • Free technical (live) phone support for the life of the product
  • Application process assistance (live) for life of the product
  • Exhaust bake hood design

Utilities

  • Power requirements: 208 to 240 volts AC, 3005-4005 watts
  • Full load current: 14.4 to 16.7 amps
  • Input breaker/fuse: 20 amps
  • Optional exhausted lid port: 2-inch OD
  • Optional exhausted lid: 10- to 30-cfm range

Exhaust bake hood design

  • All stainless steel construction
  • Exhausted hood for removal of process chemicals
  • Optional nitrogen purge for inert bake environment
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