Model 11

Precision Bake Plate
Apogee<sup>™</sup> Precision Bake Plate

The Cee® Model 11 bake plate is specifically designed for large area 450-mm-diameter substrates and 20- in square (maximum) FPD/LCD’s panels. It provides process and R&D engineers with the utmost in thermal accuracy and uniformity. The footprint is extremely compact, so it installs seamlessly within existing clean room hoods or on laboratory table surfaces.

Operation

  • Pneumatic lift pin (load/unload) standard
  • Removable fixed proximity standoffs
  • Contact or fixed proximity bake methods (standard)
  • Optional vacuum and proximity bake for 300- and 450-mm wafers
  • Optional custom bake plate surfaces available upon request

Dimensions

  • Cabinet Dimensions: 28.25" L x 28.25" W x 9.5" H
  • Machine weight: 150 lbs
  • Shipping weight: 280 lbs

Programmability

  • Dual 4-digit alphanumeric LED display
  • Full PID operation
  • Temperature auto-tuning capable
  • Security: password protection option at no charge
  • Optional ramping capability (8 specific set points)

Precision

  • Substrate Sizes: < 1cm to 450-mm round; 20” x 20” square
  • Temperature resolution: 0.1° C
  • Temperature range: ambient to 300°C (400°C optional)
  • Temperature uniformity: ± 0.3% across working surface

Reliability

  • Exceptional reliability and up-time
  • 1-year full warranty parts and labor
  • Free technical (live) phone support for the life of the product
  • Application process assistance (live) for life of the product

Utilities

  • Power requirements: 208 to 240 volts AC, 2351-3130 watts
  • Full load current: 12.5 to 15.5 amps
  • Input breaker/fuse: 20 amps
  • Optional exhausted lid port: 2-inch OD
  • Optional exhausted lid: 10- to 30-cfm range

Exhaust bake hood design

  • All stainless steel construction
  • Exhausted hood for removal of process chemicals
  • Optional nitrogen purge for inert bake environment
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