Apogee Spin Coater

With Datastream Technology
Apogee Developer

The Cost Effective Equipment Apogee spin developer delivers track-quality performance with revolutionary interface capabilities and the utmost in chemical compatibility in an efficient, space-saving design.

Benefits

  • Powered by Datastream Technology
  • New, compact design for minimized footprint
  • Full-color, 7-inch touch screen display
  • High-density polyethylene (HDPE) spin bowl for maximum chemical compatibility
  • Durable benchtop design that can be converted to a flange-/ deck-mountable configuration (mountable in the Apogee™ X-Pro II workstation)
  • DataStream™ technology as the standard interface
  • Direct-angle continuous and/or side-angle spray
  • Ability to puddle develop

Reliability

  • Indirect drive system protects the spin motor from contact with process chemicals and solvents
  • Vacuum and lid interlock
  • Industry-leading reliability and uptime
  • 1-year full warranty on parts and labor

Programmability

  • Touch screen interface and display
  • Full-color alphanumeric-capable graphical user interface (GUI)
  • Virtually unlimited number of user-defined recipe program steps
  • 0.1-second resolution for step times (9,999.9 seconds maximum step time)
  • Spin speed: 0 to 6,000 rpm (12,000 rpm option at no charge)
  • Spin speed acceleration:
    • 0 to 30,000 rpm/s unloaded
    • 0 to 23,000 rpm/s with a 200-mm substrate
    • 0 to 3,000 rpm/s with a 6” × 6” × 0.250” photomask in a recessed chuck
  • Connectivity: USB/Ethernet port for communications for uploading/downloading process parameters with DataStream™ technology
  • Simultaneous dual automated dispense capability
  • In-process/dynamic speed/acceleration control

Dimensions

  • 13.25” (33.65 cm) W × 19” (48.26 cm) D × 18” (45.72 cm) H
  • Machine weight: 46 lb (20.87 kg)
  • Shipping weight: 110 lb (49.89 kg)

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