Apogee™ Spin Coater
With Datastream™ Technology
The Cost Effective Equipment Apogee™ spin developer delivers track-quality performance with revolutionary interface capabilities and the utmost in chemical compatibility in an efficient, space-saving design.
Benefits
- Powered by Datastream™ Technology
- New, compact design for minimized footprint
- Full-color, 7-inch touch screen display
- High-density polyethylene (HDPE) spin bowl for maximum chemical compatibility
- Durable benchtop design that can be converted to a flange-/ deck-mountable configuration (mountable in the Apogee™ X-Pro II workstation)
- DataStream™ technology as the standard interface
- Direct-angle continuous and/or side-angle spray
- Ability to puddle develop
Reliability
- Indirect drive system protects the spin motor from contact with process chemicals and solvents
- Vacuum and lid interlock
- Industry-leading reliability and uptime
- 1-year full warranty on parts and labor
Programmability
- Touch screen interface and display
- Full-color alphanumeric-capable graphical user interface (GUI)
- Virtually unlimited number of user-defined recipe program steps
- 0.1-second resolution for step times (9,999.9 seconds maximum step time)
- Spin speed: 0 to 6,000 rpm (12,000 rpm option at no charge)
- Spin speed acceleration:
- 0 to 30,000 rpm/s unloaded
- 0 to 23,000 rpm/s with a 200-mm substrate
- 0 to 3,000 rpm/s with a 6” × 6” × 0.250” photomask in a recessed chuck
- Connectivity: USB/Ethernet port for communications for uploading/downloading process parameters with DataStream™ technology
- Simultaneous dual automated dispense capability
- In-process/dynamic speed/acceleration control
Dimensions
- 13.25” (33.65 cm) W × 19” (48.26 cm) D × 18” (45.72 cm) H
- Machine weight: 46 lb (20.87 kg)
- Shipping weight: 110 lb (49.89 kg)
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