Apogee Spin Coater/Developer, Apogee 450, 200X/200CBX, 300X
1/8", 5/16", 1/2", 3/4", 1", 1.5", 2.25", 4", 6.266"
These basic spin chucks are recommended for standard-thickness (< 1 mm), circular and square substrates. Common construction materials for these chucks are Delrin® (acetal), Kynar® (PVDF), Teflon® (PTFE), polyetheretherketone (PEEK), stainless steel, and anodized aluminum. The standard circular vacuum chucks are capable of processing substrates with a surface area that is not greater than twice the actual spin chuck surface diameter. Example: a 4 inch chuck is not recommended for substrate sizes larger than 8 inches (200 mm) in diameter or 8 inches square. Thicknesses can range from 275 μm up to 6 mm. As thickness increases, both maximum speed and acceleration must be decreased for safe operation. The use of a centering device, and/or verification of optimal centering of the substrate, becomes increasingly critical to maintaining positive contact between the substrate and the vacuum surface. With properly centered standard-thickness substrates (275-750 μm), we recommend maximum speed ranges of 3,000 to 6,000 rpm and accelerations of 3,000 to 6,000 rpm/s. If customers prefer to process beyond these parameters, we recommend captive or recessed spin chucks.