Film Frame Spin Chucks

Mechanical clamps and a porous ceramic insert are combined for spin coating or cleaning thinned substrates (< 250 μm) that have been taped to film frames. The ceramic insert ensures complete and uniform backside support while diffusing the vacuum source. This component utilizes both vacuum O-rings and mechanical clamps for\ securing the outer film frame to the chuck assembly. CEE® spin coaters and cleaners feature an industry-leading horsepower/torque motor drive system, which is required for maximum acceleration of this design.

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