Non-Vacuum Spin Chucks

The pedestal design is used to secure the substrate above the chuck surface without vacuum grip. The substrate
is held in place by mechanical securing tabs mounted 90 degrees from each other. These chucks are utilized
when vacuum retention is not feasible due to material migration, backside contamination, and/or non-planar
surfaces. Each chuck is custom designed and size-specific.

This product is currently out of stock and unavailable.