Porous Ceramic Spin Chucks

Utilized for thinned substrates (< 250 μm), these spin chucks are constructed of a porous ceramic insert inside
a recessed chuck cavity. They have the distinct advantage of completely supporting the backside of any given
substrate dimension and equally distributing (diffusing) the vacuum source across the entire porous surface.
This design mitigates potential vacuum-caused deflection and damage to the fragile substrate or coated film
layer.

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