Circular Spin Chucks

  • Recommended for standard-thickness, circular substrates and pieces.
  • Thickness 150 μm up to 6 mm
  • Delrin® construction compatible with a wide variety of chemicals
  • Individual sizes ready to ship: 1/8″, 5/16″, 1/2″, 3/4″, 1″, 1.5″, 2.25″, 4″, and 6.188″ diameters
  • Available in cost-saving sets. Click Here
  • Optional centering devices are available for optimal performance and safe operation. Click Here
  • Custom sizes and materials are available on request

Spin Chucks Sets

  • Reduced cost for the capability of handling multiple substrate dimensions
  • Ability to transition between different substrate sizes quickly
  • Resistance to a wide variety of chemistries

Available Sets

  • Complete Set: 1/8″, 5/16″, 1/2″, 3/4″, 1.5″, 2.25″, 4″ chucks and extra o-rings
  • Small Diameter Set: 1/8″, 5/16″, 1/2″, 3/4″, 1.5″ chucks and extra o-rings

Centering Devices

  • Centering for best coating results and safest operation
  • Each centering device is designed for wafer diameter and chuck
  • Centering devices available for standard wafers
    •  2 inc, 3 inch,100 mm, 150 mm, 200 mm, and 300mm Diameters
    • Custom sizes are available