Recessed Spin Chucks

  • Recommended for square and rectangular substrates
  • Common for microscope slides, photomasks, displays, etc.
  • Increases coating uniformity at the corners and edges
  • Standard Delrin® construction compatible with a wide variety of chemicals
  • Chucks are made to order based on substrate width, length and thickness
  • Available in custom configurations such as material, edge contact, and non-vacuum