Cee® Automatic Developer – Texas A&M AggieFab

Unknown
AZ400k Developer, DI Water, IPA, MIF300 Developer, MIF319 Developer, SU-8 developer
Spin Developer/Cleaner, 200mm Spin Developer, Apogee® 200 Spin Developer
Source:Texas A&M University AggieFab Nanofabrication Facility
Material: AZ400k Developer, DI Water, IPA, MIF300 Developer, MIF319 Developer, SU-8 developer
Source:Unknown
Texas A&M AggieFab lists a Cee® Automatic Developer used for photoresist development following exposure, supporting lithography workflows in a university cleanroom.
Publication Year: Unknown

Process Overview

This Texas A&M AggieFab equipment page identifies a Cee® Automatic Developer used for post-exposure photoresist processing within the facility. The system is integrated into lithography workflows, where exposed photoresist is developed using controlled chemical processing to define patterned features. The page ties the developer directly to standard cleanroom operations, supporting consistent and repeatable development steps following coating and exposure. This makes it a strong facility-level reference showing use of Cee® equipment beyond coating, extending into automated development processes within academic nanofabrication environments.

Related Research

Tools – BioNIUM Nanofabrication Facility

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Unknown
Spin Coater, 200mm Spin Coater, 200X (Legacy)
The University of Miami BioNIUM nanofabrication facility tool listing explicitly includes a Cee® 200X Precision Spin Coater as part of its lithography-related equipment set.

Direct Photopatterning of Metal Oxide Structures Using Photosensitive Metallorganics

4 inch
MIBK
Spin Coater, 200mm Spin Coater, 100 (Legacy)
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Cee® Spin Coater & Baking Tools – University of Kansas Nanofabrication Facility

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Unknown
Spin Coater, 200mm Spin Coater, 200X (Legacy), Bake Plates, Apogee® 200 Bake Plate, 1300X (Legacy)
The University of Kansas Nanofabrication Facility lists a Cee® coat and bake workflow that includes a Cee® 200CBX Programmable Spin Coater, Cee® 1300X Hot Plate, and Cee® Apogee® Hot Plate. The page also states that the 200CBX supports multiple chuck sizes for a variety of substrate sizes.