Wafers and Pieces
Square or Rectangle
Thin Wafers and Films
Film Frames
Special Substrates
Select one of the substrates above to view the recommended chuck, or contact us for more information.
Spin Chuck Sets
- The cost-effective solution for diverse substrate sizes.
- Designed for swift transitions between varying substrates.
- Delrin® construction for maximum chemical compatibility.
Available Sets
- Small Diameter Set (3mm – 75mm substrates)
- Complete Set (3mm – 200mm substrates)