Cee Spin Chucks
Wafers and Pieces
Square or Rectangle
Thin Wafers and Films
Film Frames
Special Substrates
Spin Chuck Sets
- Reduced cost for the capability of handling multiple substrate dimensions
- Ability to transition between different substrate sizes quickly
- Delrin® construction compatible with a wide variety of chemicals
Available Sets
- Small Diameter Set (3mm – 75mm substrates)
- Complete Set (3mm – 200mm substrates)