Circular Spin Chucks
- Recommended for standard-thickness, circular substrates and pieces.
- Thickness 150μm up to 6mm
- Delrin® construction compatible with a wide variety of chemicals
- Individual sizes ready to ship: 1/8″, 5/16″, 1/2″, 3/4″, 1″, 1.5″, 2.25″, 4″, and 6.188″ diameters
- Available in cost-saving sets.
- Optional centering devices are available for optimal performance and safe operation.
- Custom sizes and materials are available on request
Spin Chuck Sets
- Reduced cost for the capability of handling multiple substrate dimensions
- Ability to transition between different substrate sizes quickly
- Resistance to a wide variety of chemistries
Available Sets
- Complete Set: 1/8″, 5/16″, 1/2″, 3/4″, 1.5″, 2.25″, 4″ chucks and extra O-rings
- Small Diameter Set: 1/8″, 5/16″, 1/2″, 3/4″, 1.5″ chucks and extra O-rings
Centering Devices
- Centering for best coating results and safest operation
- Each centering device is designed for wafer and chuck diameters
- Centering devices available for standard semi-spec wafer diameters:
- 2″, 3″, 100mm, 125mm, 150mm, 200mm, and 300mm diameters
- Custom sizes are available upon request