Circular Spin Chucks
- Recommended for standard-thickness, circular substrates and pieces.
- Thickness of 150μm up to 6mm.
- Delrin® construction compatible with a wide variety of chemicals.
- Individual sizes ready to ship: 1/8″, 5/16″, 1/2″, 3/4″, 1″, 1.5″, 2.25″, 4″, and 6.188″ diameters.
- Available in cost-saving sets.
- Optional centering devices are available for optimal performance and safe operation.
- Custom sizes and materials are available on request.
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Spin Chuck Sets
- The cost-effective solution for diverse substrate sizes.
- Designed for swift transitions between varying substrates.
- Delrin® construction for maximum chemical compatibility.
Available Sets
- Complete Set: 1/8″, 5/16″, 1/2″, 3/4″, 1.5″, 2.25″, 4″ chucks and extra O-rings
- Small Diameter Set: 1/8″, 5/16″, 1/2″, 3/4″, 1.5″ chucks and extra O-rings
Centering Devices
- Ensures the best coating results and the safest operation.
- Customized for specific wafer and chuck diameters; ensuring an ideal fit.
Available Sizes
Centering devices are in stock for standard semi-spec wafer diameters:
- 2″, 3″, 100mm, 125mm, 150mm, 200mm, and 300mm diameters
*Custom sizes are available upon request