Circular Spin Chuck - Cost Effective Equipment

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Circular Spin Chucks

Complete Spin Chuck Set

Small Spin Chuck Set

1/8" Spin Chuck

5/16" Spin Chuck

3/4" Spin Chuck

1" Spin Chuck

1-1/2" Spin Chuck

2-1/4" Spin Chuck

4" Spin Chuck

Recommended for standard-thickness, circular substrates and pieces.
Thickness of 150μm up to 6mm.
Delrin® construction compatible with a wide variety of chemicals.
Individual sizes ready to ship: 1/8″, 5/16″, 1/2″, 3/4″, 1″, 1.5″, 2.25″, 4″, and 6.188″ diameters.
Available in cost-saving sets.
Optional centering devices are available for optimal performance and safe operation.
Custom sizes and materials are available on request.

Related Information

Videos

Spin Chuck Videos

Datasheets

Circular Spin Chuck DataSheet

Chemical Compatibility

Sizing Chart

Manuals

Spin Chuck Manual

Spin Chuck Sets

The cost-effective solution for diverse substrate sizes.
Designed for swift transitions between varying substrates.
Delrin® construction for maximum chemical compatibility.

Available Sets

Complete Set: 1/8″, 5/16″, 1/2″, 3/4″, 1.5″, 2.25″, 4″ chucks and extra O-rings
Small Diameter Set: 1/8″, 5/16″, 1/2″, 3/4″, 1.5″ chucks and extra O-rings

Related Information

Datasheets

Spin Chuck Sets

Sizing Chart

Manuals

Spin Chuck Manual

Centering Devices

Centering Devices

200mm Centering Device

150mm Centering Device

100mm Centering Device

50mm Centering Device

Centering Device In Use

Ensures the best coating results and the safest operation.
Customized for specific wafer and chuck diameters; ensuring an ideal fit.

Available Sizes

Centering devices are in stock for standard semi-spec wafer diameters:

2″, 3″, 100mm, 125mm, 150mm, 200mm, and 300mm diameters

*Custom sizes are available upon request

Related Information

Videos

Centering Device Use

Manuals

Centering Device Manual

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