Spin Coating on a Whole New Level
Apogee™ Spin Coater
Up to 200 mm round or 7" x 7" square
Cee® 300X Spin Coater
Up to 450 mm round or 14" x 14" square
Consistent, reliable spin coating results the first time, every time.
ALWAYS TOP PERFORMANCE
No more wasted time reworking wafers. Regardless of the wafer size or coating thickness, Apogee™ Spin Coaters are designed to achieve production quality results without the footprint and investment of a track system.
GET STARTED NOW!
1. Get a quote
Answer a few simple questions and receive your quote.
2. Install the equipment
Installation is quick and easy with the included step-by-step instructions.
3. Run With Confidence
From installation to process guidance, enjoy reliable support from our world class team.
Program. Monitor. Analyze.
Stop wondering what went wrong. DataStream™ monitors and records all processing parameters in real-time. Proactive warnings and detailed log files give you the information you need to succeed.
Cost Effective Equipment spin coaters have been the benchmark for photoresist processing since the Cee® Model 100 was introduced over 25 years ago. All of our high reliability spinners incorporate digital indirect spindle drive technology that eliminates the well-known chuck heating and motor reliability problems common in cheap spin coaters.
The exclusive DataStream™ technology records all of your process data including temperature and humidity of the coating environment and makes recipe creation a snap. Plug the Apogee™ spin coater into your network and you can write recipes, download logs and monitor the tool in real-time from your desk or anywhere else.
Because of our decades of experience in coating and baking semiconductor wafers, MEMS devices, flat panel displays, photomasks, and bio-medical devices, Cee® tools offer the maximum in flexibility and reliability. A simple web search for Cee® spin coater shows these tools being used around the world.
We offer a variety of spin chucks, both standard and custom to produce beautiful, defect free coatings with high uniformity. Also, available accessories like automatic dispense systems and programmable exhaust controls eliminate the variability and inconsistency that wastes your time and causes rework.