Bake Plate Accesories
Nitrogen Purge
- low-oxygen environment
- minimize the risk of safety hazards
- reduces oxidation of materials
- compatible with nitrogen or other inert gases
- exhausted hood
- capable of providing ~100-ppm oxygen environment (with 30-psi/5-lpm flow).
- Technical Resource – Click Here
400ºC Option
- allows the standard 300ºC Apogee® Bake Plate go up to 400ºC
- for high temperature processes
- Cool Touch Hood promotes operator safety
Plastic Tipped Lift Pins
- extra layer of protection to prevent scratching or damage to substrates
- available in:
- Vespel®: 300ºC max bake temperature
- Teflon™: 200ºC max bake temperature
Vacuum Pump
- dedicated vacuum supply
- cleanroom compatible
- oil-less and maintenance-free
- compact and quiet (50 dB)
- available in 110V or 220V
- 20-25 in/Hg, 20L/min
Light Tree
- LED 3 status tree
- red – error
- yellow – idle
- green – in process
- color cycle – initialization
Passive Chill Station
Hood Mounted
- space saving design
- tweezer or vacuum wand pick up
- standard 200mm wafer cools from 200C to ambient temperature <10 seconds
- size matched to bake plate
1 or 5 Tier
- table top design
- available in 1 or 5 stack (pictured)
- tweezer or vacuum wand pick up
- max wafer size: 300mm
