Bake Plate Accesories
Nitrogen Purge
- low-oxygen environment
- minimize the risk of safety hazards
- reduces oxidation of materials
- compatible with nitrogen or other inert gases
- exhausted hood
- capable of providing ~100-ppm oxygen environment (with 30-psi/5-lpm flow).
- Technical Resource – Click Here
![](https://i0.wp.com/www.costeffectiveequipment.com/wp-content/uploads/Purge-Adder.jpg?fit=225%2C300&ssl=1)
400ºC Option
- allows the standard 300ºC Apogee® Bake Plate go up to 400ºC
- for high temperature processes
- Cool Touch Hood promotes operator safety
![](https://i0.wp.com/www.costeffectiveequipment.com/wp-content/uploads/400C.png?fit=712%2C544&ssl=1)
Plastic Tipped Lift Pins
- extra layer of protection to prevent scratching or damage to substrates
- available in:
- Vespel®: 300ºC max bake temperature
- Teflon™: 200ºC max bake temperature
![](https://i0.wp.com/www.costeffectiveequipment.com/wp-content/uploads/Plastic-tipped-Lift-Pins.jpg?fit=300%2C225&ssl=1)
Vacuum Pump
- dedicated vacuum supply
- cleanroom compatible
- oil-less and maintenance-free
- compact and quiet (50 dB)
- available in 110V or 220V
- 20-25 in/Hg, 20L/min
![](https://i0.wp.com/www.costeffectiveequipment.com/wp-content/uploads/VacuumPump-scaled.jpg?fit=300%2C225&ssl=1)
Light Tree
- LED 3 status tree
- red – error
- yellow – idle
- green – in process
- color cycle – initialization
![](https://i0.wp.com/www.costeffectiveequipment.com/wp-content/uploads/20231026_091633-1.jpg?fit=300%2C169&ssl=1)
Passive Chill Station
Hood Mounted
- space saving design
- tweezer or vacuum wand pick up
- standard 200mm wafer cools from 200C to ambient temperature <10 seconds
- size matched to bake plate
![](https://i0.wp.com/www.costeffectiveequipment.com/wp-content/uploads/BakePlatechill.jpg?fit=300%2C289&ssl=1)
1 or 5 Tier
- table top design
- available in 1 or 5 stack (pictured)
- tweezer or vacuum wand pick up
- max wafer size: 300mm
![](https://i0.wp.com/www.costeffectiveequipment.com/wp-content/uploads/5-Tier-Chill-Plate.png?fit=500%2C520&ssl=1)