Overview

The Vacuum Pump provides a dedicated vacuum source for Apogee® Bake Plates when facility vacuum is unavailable or insufficient, enabling hard contact bakes.

Key Capabilities

Key performance characteristics include:

• Oil-free diaphragm design eliminates contamination risks associated with oil-based vacuum systems

• Chemically resistant PTFE-coated internal components support compatibility with solvent-rich processing environments

• Cleanroom-compatible operation suitable for semiconductor research, university labs, bio-medical applications, and advanced material processing

• Quiet operation (~50 dB) minimizes disruption in laboratory environments

• Compact footprint allows convenient placement near the equipment or within workstation enclosures

The pump delivers sufficient vacuum and flow capacity to maintain secure substrate retention during bake plate operations.

Because the vacuum source is dedicated to the equipment, performance remains consistent regardless of other vacuum users within the facility.

Safety & Facilities

The oil-free design eliminates the need for vacuum oil maintenance and reduces the risk of chemical contamination in cleanroom environments. Integrated thermal protection safeguards the pump against overheating, automatically pausing operation if internal temperatures exceed safe limits and resuming once cooled.

Proper ventilation around the pump should be maintained to allow adequate cooling during operation.

Compatibility

The Vacuum Pump is available for:

• Apogee® 200 Bake Plate

• Apogee® 300 Bake Plate