Document Library

Find manuals, documents, drawings, and technical files by equipment or file type.

The Cee® Document Library provides access to manuals, CAD files, and technical documentation for spin coaters, bake plates, bonders, and supporting wafer processing equipment.

This includes both current Apogee® platforms and legacy Cee® systems still in operation worldwide.

Refine Results

Document Type

Equipment

File Extension

Apogee® Mechanical Debonder Equipment Overview

Apogee® Mechanical Debonder, Debonder

Apogee® Mechanical Debonder Preventative Maintenance Procedures

Apogee® Mechanical Debonder, Debonder

Apogee® Mechanical Debonder System Operations Document

Apogee® Mechanical Debonder, Debonder

Apogee® Mechanical Debonder Troubleshooting and Diagnostics

Apogee® Mechanical Debonder, Debonder

Apogee® Bonder Equipment Overview

Apogee® Bonder, Bonder

Apogee® Bonder Troubleshooting and Diagnostics

Apogee® Bonder, Bonder

Apogee® Bonder Preventative Maintenance Procedures

Apogee® Bonder, Bonder

300X Datasheet

300X, Spin Coater

300XD Datasheet

300XD, Spin Developer

Apogee® Bonder Process Overview

Apogee® Bonder, Bonder

300X Manual

300X, Spin Coater

1300CSX Manual

1300CSX, Debonder

Apogee® Mechanical Debonder Utilities

Apogee® Mechanical Debonder, Debonder

Cee 1300CSX Maintenance Manual

1300CSX, Debonder

1300CSX Precision Loading Arm

1300CSX, Debonder

CEE® Apogee™ Spin Coater – Coating Uniformity

Apogee® 200 Spin Coater, Spin Coater

Cee® 300X Uniformity

300X, Spin Coater

Apogee® Bonder Utilities Requirements

Apogee® Bonder, Bonder

300XD Utilities

300XD, Spin Developer

Apogee® 200 Bake Plate Flange Utilities

Apogee® 200 Bake Plate, Bake Plate

Apogee® Spin Coater-Flange Mount Utilities

Apogee® 200 Spin Coater, Spin Coater

300X Utilities

300X, Spin Coater

Apogee® 200 Spin Coater Utilities

Apogee® 200 Spin Coater, Spin Coater

Apogee® 200 Developer Flange Utilities

Apogee® 200 Developer, Spin Developer

Explore Equipment Platforms

Learn more about each equipment platform, including system capabilities, configuration options, and typical process applications.

Workstations

Spin Coaters

Bake Plates

Developers

Bonders/ Debonders

Custom

Additional Resources

Explore application insights, system selection guidance, and process fundamentals to better understand equipment capabilities and optimize your workflow.