Document Library

Find manuals, documents, drawings, and technical files by equipment or file type.

The Cee® Document Library provides access to manuals, CAD files, and technical documentation for spin coaters, bake plates, bonders, and supporting wafer processing equipment.

This includes both current Apogee® platforms and legacy Cee® systems still in operation worldwide.

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Apogee® Flange Mount 450 Spin Coater-Lid Closed (STEP)

Apogee® Flange Mount 450 Spin Coater-Lid Closed (PDF)

Apogee® Flange Mount 450 Spin Coater-Lid Open (PDF)

Apogee® Flange Mount 450 Spin Developer-Lid Open (PDF)

Apogee® Flange Mount 450 Spin Developer-Lid Open (STEP)

Apogee® Flange Mount 450 Spin Developer-Lid Open (STEP)

Apogee® Flange Mount 450 Spin Developer-Lid Closed (STEP)

Apogee® Benchtop 450 Spin Developer-Lid Open (PDF)

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Apogee® Benchtop 450 Spin Developer-Lid Closed (STEP)

Apogee® Flange Mount 450 Spin Developer-Lid Closed (PDF)

Apogee® Benchtop 300 Bake Plate-Lid Closed (PDF)

Apogee® Benchtop 300 Bake Plate-Lid Closed (STEP)

Apogee® Benchtop 300 Bake Plate-Lid Open (PDF)

Apogee® Benchtop 300 Bake Plate-Lid Open (PDF)

Apogee® Benchtop 200 Bake Plate-Lid Closed (STEP)

Apogee® Benchtop 200 Bake Plate-Lid Open (PDF)

Apogee® Benchtop 200 Spin Developer-Lid Open (STEP)

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Explore Equipment Platforms

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Additional Resources

Explore application insights, system selection guidance, and process fundamentals to better understand equipment capabilities and optimize your workflow.