Document Library

Find manuals, documents, drawings, and technical files by equipment or file type.

The Cee® Document Library provides access to manuals, CAD files, and technical documentation for spin coaters, bake plates, bonders, and supporting wafer processing equipment.

This includes both current Apogee® platforms and legacy Cee® systems still in operation worldwide.

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Equipment

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X-Pro II Full Size Workstation, FFU, Doors and Sash Closed (PDF)

Full Size X-Pro II Workstation, X-Pro II Workstation

X-Pro II Full Size Workstation, Ducted Exhausr, Doors and Sash Open (STEP)

Full Size X-Pro II Workstation, X-Pro II Workstation

X-Pro II Full Size Workstation, Ductless Recirculation, Doors and Sash Closed (STEP)

Full Size X-Pro II Workstation, X-Pro II Workstation

X-Pro II Full Size Workstation, Ductless Circulation, Doors and Sash Closed (PDF)

Full Size X-Pro II Workstation, X-Pro II Workstation

Safety Controller_Summary of Operation

Full Size X-Pro II Workstation, Half Size X-Pro II Workstation, X-Pro II Workstation

Apogee® Flange Mount Control Panel Drawing (PDF)

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Bake Plate, Spin Coater, Spin Developer

Apogee® Flange Mount Control Panel Drawing (DWG)

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Bake Plate, Spin Coater, Spin Developer

Apogee® Flange Mount Control Panel Drawing (DXF)

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Bake Plate, Spin Coater, Spin Developer

Apogee® Benchtop 200 Spin Coater Drawing (PDF)

Apogee® 200 Spin Coater, Spin Coater

Apogee® Benchtop 200 Spin Coater Drawing (DWG)

Apogee® 200 Spin Coater, Spin Coater

Apogee® Benchtop 200 Spin Coater Drawing (DXF)

Apogee® 200 Spin Coater, Spin Coater

Apogee® Flange Mount 200 Spin Coater Drawing (DXF)

Apogee® 200 Spin Coater, Spin Coater

Apogee® Flange Mount 200 Spin Coater Drawing (PDF)

Apogee® 200 Spin Coater, Spin Coater

Apogee® Flange Mount 200 Spin Coater – Drawing (DWG)

Apogee® 200 Spin Coater, Spin Coater

Apogee® Flange Mount Control Panel – Drawing (PDF)

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Bake Plate, Spin Coater, Spin Developer

Apogee® Flange Mount Control Panel – Drawing (DWG)

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Bake Plate, Spin Coater, Spin Developer

Apogee® Flange Mount Control Panel – Drawing (DXF)

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Bake Plate, Spin Coater, Spin Developer

Apogee® 450 Spin Coater Manual

Apogee® 450 Spin Coater, Spin Coater

Apogee® Benchtop 450 Spin Coater – Drawing (PDF)

Apogee® 450 Spin Coater, Spin Coater

Apogee® Benchtop 450 Spin Coater – Drawing (DWG)

Apogee® 450 Spin Coater, Spin Coater

Apogee® Benchtop 450 Spin Coater – Drawing (DXF)

Apogee® 450 Spin Coater, Spin Coater

Apogee® Benchtop 450 Spin Coater – Drawing (DXF)

Apogee® 450 Spin Coater, Spin Coater

Apogee® Benchtop 450 Spin Coater – Drawing (PDF)

Apogee® 450 Spin Coater, Spin Coater

Apogee® Benchtop 450 Spin Coater – Drawing (DWG)

Apogee® 450 Spin Coater, Spin Coater

Explore Equipment Platforms

Learn more about each equipment platform, including system capabilities, configuration options, and typical process applications.

Workstations

Spin Coaters

Bake Plates

Developers

Bonders/ Debonders

Custom

Additional Resources

Explore application insights, system selection guidance, and process fundamentals to better understand equipment capabilities and optimize your workflow.

Document Library

Find manuals, documents, drawings, and technical files by equipment or file type.

Refine Results

X-Pro II Full Size Workstation, FFU, Doors and Sash Closed (PDF)

X-Pro II Full Size Workstation, Ducted Exhausr, Doors and Sash Open (STEP)

X-Pro II Full Size Workstation, Ductless Recirculation, Doors and Sash Closed (STEP)

X-Pro II Full Size Workstation, Ductless Circulation, Doors and Sash Closed (PDF)

Safety Controller_Summary of Operation

Apogee® Flange Mount Control Panel Drawing (PDF)

Apogee® Flange Mount Control Panel Drawing (DWG)

Apogee® Flange Mount Control Panel Drawing (DXF)

Apogee® Benchtop 200 Spin Coater Drawing (PDF)

Apogee® Benchtop 200 Spin Coater Drawing (DWG)

Apogee® Benchtop 200 Spin Coater Drawing (DXF)

Apogee® Flange Mount 200 Spin Coater Drawing (DXF)

Apogee® Flange Mount 200 Spin Coater Drawing (PDF)

Apogee® Flange Mount 200 Spin Coater – Drawing (DWG)

Apogee® Flange Mount Control Panel – Drawing (PDF)

Apogee® Flange Mount Control Panel – Drawing (DWG)

Apogee® Flange Mount Control Panel – Drawing (DXF)

Apogee® 450 Spin Coater Manual

Apogee® Benchtop 450 Spin Coater – Drawing (PDF)

Apogee® Benchtop 450 Spin Coater – Drawing (DWG)

Apogee® Benchtop 450 Spin Coater – Drawing (DXF)

Apogee® Benchtop 450 Spin Coater – Drawing (DXF)

Apogee® Benchtop 450 Spin Coater – Drawing (PDF)

Apogee® Benchtop 450 Spin Coater – Drawing (DWG)

Explore Equipment Platforms

Learn more about each equipment platform, including system capabilities, configuration options, and typical process applications.

Workstations

Spin Coaters

Bake Plates

Developers

Bonders/ Debonders

Custom

Additional Resources

Research Using Spin Coaters

Spin Coater Buyers Guide

Spin Coating Theory

Technical Resources