Spin Coaters Used in Leading Research & Universities Worldwide

Real Research. Real Labs. Proven Results.

Spin coating and wafer processing are foundational to semiconductor fabrication, university nanofabrication, biomedical research, and advanced materials development worldwide. Cee® spin coaters and wafer processing equipment have supported these environments since 1987, with systems actively used in university cleanrooms, research labs, and application-driven process development.

Originally developed as part of Brewer Science to meet demanding internal semiconductor requirements where commercially available systems fell short, Cee® equipment has been proven across real-world research and process environments. This reference library highlights published work, university facilities, and application-specific use involving Cee® systems.

Today, Cee® continues this legacy, delivering repeatable, high-performance wafer processing equipment used in nanofabrication labs, MEMS development, lithography workflows, and advanced materials research worldwide, with systems frequently referenced in peer-reviewed research across semiconductor processing, materials science, and microfabrication applications.

See documented research below, or explore spin coater options and selection guidance.

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Off-Stoichiometry Thiol–Ene Polymers: Inclusion of Anchor Groups Using Allylsilanes

This paper develops OSTE-AS polymers for bonding and integration with silicon wafers and explicitly states that the OSTE-AS prepolymers were deposited on silicon wafers using a Cee® Apogee® Spin Coater module of an X-Pro II Workstation. The paper also reports 100 mm silicon wafers and gives resulting film thicknesses of 12.9 µm, 4.9 µm, and 3.4 µm at 1000, 3000, and 5000 rpm, respectively.

Omnidirectional Circularly Polarized Thermal Radiation Enabled by Chiral Metasurface

This paper describes fabrication of a chiral metasurface for circularly polarized thermal radiation and includes use of a Cee® Apogee® Spin Coater and Cee® Apogee® Bake Plate in the sample preparation flow, including spin coating of PMMA 950 K A4.

Microfluidic Bioelectrochemical Cell Platform for the Study of Extracellular Electron Uptake in Microbes

This preprint describes fabrication of a glass-based microfluidic bioelectrochemical cell platform and explicitly states that KL8020 HMDS Spin-On Primer was spin coated on 100 mm borosilicate glass wafers using an Apogee® Spin Coater. The broader lithography flow also includes spin-coated LOR 10B, Microposit™ S1805™, AZ P4620, and SU-8 2100.

Design and Fabrication of an Electronic Skin Sensor and Sensor Array for Contact Pressure Monitoring during Colonoscopy

This thesis describes fabrication of a flexible electronic skin sensor and sensor array for colonoscopy pressure monitoring and explicitly shows AZ 10XT photoresist being applied to a silicon wafer mounted in an Apogee® Spin Coater during the electrode preparation process.

Fast Switching Liquid Crystal Materials: From Design to Biomedical Application

This dissertation describes liquid crystal cell preparation for advanced optical and biomedical applications and explicitly states that Nissan Chemicals ER-1744 polyimide was spin coated onto ITO-coated soda-lime glass using an Apogee® Spin Coater. A three-step spin recipe is also provided for the polyimide coating process.

International Electric Propulsion Conference

This conference paper describes fabrication of porous-glass electrospray thrusters and explicitly states that SU-8 2005 was spun using a Cee® Apogee® manual spin coater.

The Role of Time in the Structural Ordering of Poly-3-Hexylthiophene

This paper studies annealing-time effects in P3HT thin films and explicitly states that a P3HT–chloroform solution was spin-deposited on glass substrates using an Apogee® Spin Coater.

Lithography – The Advanced Science Research Center Nanofabrication Facility

The CUNY ASRC Nanofabrication Facility lithography page lists multiple Cee® coating systems, including a Cee® Stand-Alone Spin Coater / hotplate for electron beam resists and two additional Cee® Spin Coaters for photoresist processing and other non-standard materials.

Tools – BioNIUM Nanofabrication Facility

The University of Miami BioNIUM nanofabrication facility tool listing explicitly includes a Cee® 200X Precision Spin Coater as part of its lithography-related equipment set.

Direct Photopatterning of Metal Oxide Structures Using Photosensitive Metallorganics

This Georgia Tech paper describes direct photopatterning of mixed-metal oxide films using a photosensitive metallorganic precursor. The precursor films were spin coated onto 100 mm single-side polished silicon wafers using a Cee® Model 100 CB Spin Coater and Bake Unit

Cee® Spin Coater & Baking Tools – University of Kansas Nanofabrication Facility

The University of Kansas Nanofabrication Facility lists a Cee® coat and bake workflow that includes a Cee® 200CBX Programmable Spin Coater, Cee® 1300X Hot Plate, and Cee® Apogee® Hot Plate. The page also states that the 200CBX supports multiple chuck sizes for a variety of substrate sizes.

Cee® Lithography Tools – Lurie Nanofabrication Facility

The University of Michigan Lurie Nanofabrication Facility equipment directory lists multiple Cee® lithography tools, including coating, developing, and Apogee® spin coating platforms within the facility’s lithography area.

New Equipment at CNF – Cee® Model 100 Spin Coaters

This Cornell NanoScale Facility newsletter identifies two bench-top mounted Cee® Model 100 Spin Coaters used for resist coating of wafers, with support for substrates up to 200 mm round or 6-inch square.

Fundamentals of microfluidics fabrication process and the basic process flow of fabrication

This Washington University report references use of AZ4620 photoresist coated onto the wafer using a Cee® 200X Spin Coater as part of the microfluidics fabrication process.

Spin Coating – University of Kentucky CeNSE

The University of Kentucky CeNSE spin coating page explicitly references the Cee® Model 100 and 150 and describes them as part of the facility’s spin coating capability for thin-film application.

Nanofabrication Equipment & Instrumentation – Penn Nano

The Penn Nano equipment page includes imagery of a Cee® 200X Spin Coater within its spinner and solvent processing area, indicating active use of Cee® coating equipment in the facility.

PDMS Spin Coater – University of Kansas Nanofabrication Facility

The University of Kansas Nanofabrication Facility lists a Cee® Spin Coater dedicated to PDMS coating, supporting soft lithography and polymer-based device fabrication processes.

Lithography Equipment – Washington University in St. Louis Micronanofabrication Facility

Washington University’s Micronanofabrication Facility lists Cee® Spin Coaters as part of its lithography equipment, supporting photoresist coating and bake processes in an academic cleanroom environment.

Cee® 100 Spin Coater – Utah Nanofab Wiki

The University of Utah Nanofab wiki lists a Cee® 100 Spin Coater used for photoresist coating in lithography processes within a shared cleanroom environment.

Cee® Apogee® Spin Coater – Penn Nano Wiki

The Penn Nano Wiki lists a Cee® Apogee® Spin Coater used for photoresist coating in lithography processes, supporting substrates up to 6-inch wafers within a shared nanofabrication environment.

Spin Coating – University of Houston NanoFabrication Facility

The University of Houston NanoFabrication Facility lists a Cee® Spin Coater for thin film and photoresist coating, supporting a range of lithography and polymer deposition processes within an open-access cleanroom environment.

Cee® Spin Coater #1 and #2 – ASU NanoFab

ASU NanoFab lists Cee® Spin Coater #1 and #2 as photoresist coating systems in its cleanroom. The page explicitly identifies Cee® Spin Coater #1 as having a programmable precision hot plate bake, Cee® Spin Coater #2 as a stand-alone Spin Coater, and names the Cee® 200CBX precision coat-bake system as the integrated platform.

Cee® Apogee® Spin Coater – LNF Wiki

The University of Michigan LNF Wiki lists a Cee® Apogee® Spin Coater as a fully programmable, manual-dispense photoresist coating system that accepts pieces, 4-inch wafers, and 6-inch wafers.

Cee® 200X Photoresist Spinner 1 – LNF Wiki

The University of Michigan LNF Wiki lists a Cee® 200X photoresist spinner as a fully programmable, automatic-dispense coating system with support for 4-inch and 6-inch wafers as well as pieces up to 2 inches.

What This Page Represents

This page documents real-world use of Cee® equipment in research and development environments.

Each reference below represents:

  • Published research
  • University lab installations
  • Documented wafer processing applications


These are verifiable use cases, not marketing claims.

*Where process details are not specified in the original source, entries are labeled accordingly to maintain accuracy.

 

Cee® Equipment in University and R&D Applications

Cee® systems support a wide range of research fields:

  • Semiconductor fabrication – lithography and photoresist coating
  • MEMS development – micro-scale device fabrication
  • Microfluidics – channel formation and polymer structuring
  • Advanced materials – thin films and specialty coatings

These applications demand consistent, repeatable processing performance,a core strength of Cee® equipment.

This foundation continues to influence modern Cee® system design, ensuring performance aligned with real-world wafer processing challenges.

Proven in Research Environments

Cee® equipment is actively used across academic and industrial research settings:

  • Referenced in peer-reviewed publications and university research
  • Deployed in nanofabrication facilities and cleanrooms worldwide
  • Supporting spin coating, baking, developing, and wafer-level processing
  • Used for photoresists, polymers, and advanced coating materials
  • Lineage of systems dating back to 1987

Processes Using Cee® Equipment

Cee® spin coaters and bake systems are used for:

  • Spin coating of photoresists (e.g., AZ series, SU-8)
  • Thick film and multi-layer coating processes
  • Edge bead removal (EBR)
  • Soft bake and hard bake processing
  • Thin film and polymer coating applications

These processes require uniformity, repeatability, and precise process control.

Built for Repeatability. Proven Through Use.

Cee® equipment is designed to deliver:

  • Uniform coating performance across substrates
  • Controlled thermal processing for solvent evaporation and curing
  • Repeatable recipes and process parameters
  • Long term reliability operation in both research and production environments


The references above represent a subset of documented applications, demonstrating how Cee® equipment supports real-world wafer processing challenges.

Engineered for Real Process Demands

Unlike general purpose systems lacking process specific control, Cee® equipment was originally engineered to meet internal semiconductor processing requirements where precision, repeatability, and material compatibility were critical.

Cost Effective Equipment® originated in 1987 as a division of Brewer Science, where vigorous internal process requirements demanded higher performance and reliability than available on the commodity market. To meet these demands, spin coating and bake equipment were developed specifically to support advanced materials processing. These internally developed systems were later adopted by research labs and universities worldwide, forming the foundation of what is now Cee® Apogee™ wafer processing equipment.

In 2017, Cee® became an independent company, continuing to build on this foundation with a focused commitment to reliable, high-performance wafer processing equipment.