Spin-coatable metal doped silicon-containing film-forming compositions and processes of using them for deposition

How Cee® equipment is used

The patent's experimental examples state that spin coating was conducted with a Brewer Science Cee 200X, after filtering the formulations.

Equipment reported

Cee® 200X

Source type

Patent experimental example

Publication year

Not recorded

Materials

Not reported

Substrate

Not reported

Source

Google Patents

Process context

This entry describes a patent example. Consult the original document for the experimental procedure and the scope of its claims.