Cee® Bake Plate Applications

Explore research, patents, SOPs, and facility references documenting Cee® bake plates in resist processing, thin-film preparation, and materials development. Includes current and legacy equipment.

47 references

SOP / protocolCee® 200CBX2015

develop-Brewer Hotplate and Develop Station Standard Operating Procedure

MIT Fabtools

This process document describes spray and puddle development plus post-exposure, image-reversal and hard bakes. The workflow uses Cee® 200CBX.

LithographyCD-26 developerDeveloperDI Water
Citation & equipment evidence

Source reference

Payer K. 2015. develop-Brewer Hotplate and Develop Station Standard Operating Procedure. Massachusetts Institute of Technology. October 2015.

Equipment evidence

The source names the installation Cee 200CBX and describes a developer and hotplate workflow. Its documented process role is retained rather than inferring a coater configuration from the model name.

Source location: Page 1, Model, Purpose, Author, and Introduction.

Paper / reportCee® 200X; Cee® 1300X2020

Application of the Metal Reflector for Redistributing the Focusing Intensity of SPPs

PubMed Central

This study describes photoresist preparation for surface-plasmon-polariton focusing structures. The workflow uses Cee® 200X; Cee® 1300X.

PhotonicsPhotoresist
Citation & equipment evidence

Source reference

Ji J, Xu P, Lin Z, Chen J, Li J, Meng Y. 2020. Application of the Metal Reflector for Redistributing the Focusing Intensity of SPPs. Nanomaterials (Basel, Switzerland). 10(5):E937. DOI: 10.3390/nano10050937.

Equipment evidence

The source identifies a Cee® 200X for coating FPT-8Boc at 3000 rpm and a Cee® 1300X for drying. It reports a resulting resist film thickness of 30 nm. These values describe the authors’ process.

Source location: Experimental fabrication description, FPT-8Boc film preparation.

Paper / reportCee® 200X; Apogee® Bake Plate

Lithographic performances of aryl sulfonate ester-modified polystyrenes as nonchemically amplified resists

Royal Society of Chemistry

This study describes nonchemically amplified polystyrene resists for advanced lithography. The workflow uses Cee® 200X; Apogee® Bake Plate.

LithographyPhotoresistPolystyrene
Citation & equipment evidence

Source reference

Royal Society of Chemistry. Lithographic performances of aryl sulfonate ester-modified polystyrenes as nonchemically amplified resists

Equipment evidence

The experimental methods explicitly identify CEE200X and an Apogee Bake Plate for resist-film preparation before electron-beam and EUV evaluation.

ThesisCee® 100CB

Fabrication and characterization of self-sensing and self-actuating piezoresistive microscale silicon cantilevers for an integrated scanning probe microscopy and scanning electron microscopy system

TU Ilmenau Thesis

This thesis describes silicon cantilever microfabrication for integrated SPM/SEM. The workflow uses Cee® 100CB.

MicrofabricationPhotoresist
Citation & equipment evidence

Source reference

TU Ilmenau Thesis. Fabrication and characterization of self-sensing and self-actuating piezoresistive microscale silicon cantilevers for an integrated scanning probe microscopy and scanning electron microscopy system

Equipment evidence

Methods identify the Cee 100CB hotplate and describe TI Prime/AZ1518 lithography.

PatentCee spinners and hotplates; models unspecified

Solubility switch topographic fill materials and methods

Google Patents

This patent describes spin-on gap-fill materials for deep wafer topography. The workflow uses Cee spinners and hotplates; models unspecified.

Advanced PackagingMaterial Science
Citation & equipment evidence

Source reference

Google Patents. Solubility switch topographic fill materials and methods

Equipment evidence

The patent's experimental text identifies spinners and hotplates from Cost Effective Equipment in the fill-material preparation workflow.

PatentCee® 100CB

Surface treatments for alignment of block copolymers

Google Patents

This patent describes cross-linked surface treatments controlling block-copolymer orientation. The workflow uses Cee® 100CB.

LithographyNanofabrication
Citation & equipment evidence

Source reference

Google Patents. Surface treatments for alignment of block copolymers

Equipment evidence

Instrumentation section explicitly states films were coated and baked on a Brewer CEE100CB.

ThesisCee® 200; Cee® 1100FX2025

Transport Properties of II-VI Organic-Inorganic Hybrid Semiconductors

UNC Charlotte Doctoral Thesis

This thesis describes lateral devices for organic–inorganic hybrid semiconductor transport measurements. The workflow uses Cee® 200; Cee® 1100FX.

Material ScienceSU-8
Citation & equipment evidence

Source reference

UNC Charlotte Doctoral Thesis. 2025. Transport Properties of II-VI Organic-Inorganic Hybrid Semiconductors

Equipment evidence

Dissertation methods identify a CEE200 for SU8 coating and CEE1100FX for two-step prebake.

Paper / reportCee® spin coater and integrated hotplate

Highly Localized Enrichment of Trypanosoma brucei Parasites Using Dielectrophoresis

Micromachines (MDPI)

This study describes patterned titanium electrodes for parasite enrichment. The workflow uses Cee® spin coater and integrated hotplate.

BioMicrofluidicsPhotoresist
Citation & equipment evidence

Source reference

Micromachines (MDPI). Highly Localized Enrichment of Trypanosoma brucei Parasites Using Dielectrophoresis

Equipment evidence

Titanium-electrode fabrication explicitly uses Brewer Sciences Cee spin coater and integrated hotplate for LOR.

PatentCee® 100CB

Method for directed self-assembly

Google Patents

This patent describes silicon hardmask/neutral layers for directed self-assembly. The workflow uses Cee® 100CB.

LithographyNanofabricationPhotoresist
Citation & equipment evidence

Source reference

Google Patents. Method for directed self-assembly

Equipment evidence

Example solvent/developer exposure tests use a Cee100CB spin-coater/bake-plate tool.

PatentCee® 100; Cee® 1100

Perfluoropolyether benzotriazole derivatives and use thereof as coatings

Google Patents

This patent describes low-surface-energy coatings on metal-coated silicon. The workflow uses Cee® 100; Cee® 1100.

Material Science
Citation & equipment evidence

Source reference

Google Patents. Perfluoropolyether benzotriazole derivatives and use thereof as coatings

Equipment evidence

Experimental method uses CEE100 spinner and CEE1100 vacuum hotplate before contact-angle characterization.

PatentCee® 100CB

Apparatus and method for recirculating alkane impregnation solution

Google Patents

This patent describes photoresist preparation, post-exposure bake and topcoat removal for immersion-fluid testing. The workflow uses Cee® 100CB.

LithographyPhotoresist
Citation & equipment evidence

Source reference

Google Patents. Apparatus and method for recirculating alkane impregnation solution

Equipment evidence

Wafer-preparation experiment identifies CEE100CB spinner/hotplate and subsequent spin-cleaning of the topcoat.

PatentCee® 100CB

Permanent resist composition, cured product thereof, and use thereof

Google Patents

This patent describes thick permanent-resist coating and lithographic evaluation. The workflow uses Cee® 100CB.

LithographyPhotoresist
Citation & equipment evidence

Source reference

Google Patents. Permanent resist composition, cured product thereof, and use thereof

Equipment evidence

Samples are coated on100mm silicon using CEE100CB and baked on its attached hotplates before exposure.

About these references

Each entry identifies its source type and links to the original document. Cee prepares the application summaries. Papers, patents, SOPs, and facility descriptions provide different kinds of evidence; inclusion does not imply endorsement by their authors.

Browse all application references

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