SOP / protocol

California DREAMS Cleanroom Gateway Handbook

This process document describes silicon-window/art-wafer photolithography training process. The workflow uses Apogee® Bake Plate.

How Cee® equipment is used

Sample project traveler specifies Apogee Bake Plate for dehydration and HMDS primer bake; the coating tool is separately identified as Laurell.

Equipment reported: Apogee® Bake Plate
Source type: Training process handbook
Publication year: 2025
Materials: HMDS
Substrate: Si
Source: California DREAMS

Process context

The process details describe the cited work. Reported recipes and results depend on the authors’ materials, substrates, and equipment configuration. Materials recorded for this reference include HMDS.

Source and equipment evidence

California DREAMS. 2025. California DREAMS Cleanroom Gateway Handbook.

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Application summary prepared by Cee. The original source remains the authority for its methods and findings.

California DREAMS Cleanroom Gateway Handbook

How Cee® equipment is used

Process context

Source and equipment evidence

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