Patent
Method for directed self-assemblyCee® 100CB
This patent describes cross-linked surface treatments controlling block-copolymer orientation. The workflow uses Cee® 100CB.
Instrumentation section explicitly states films were coated and baked on a Brewer CEE100CB.
This entry describes a patent example. Consult the original document for the experimental procedure and the scope of its claims.
Google Patents. Surface treatments for alignment of block copolymers.
Open original source ↗Application summary prepared by Cee. The original source remains the authority for its methods and findings.
SEMICON EUROPA · 10–13 NOVEMBER
Meet Jacob, CEE’s Global Sales Director, in Munich with our partner SiSTEM Technology.
Stand C1353 · Messe München
Spin coating, bake and chill, temporary bonding and debonding.
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