CEE Apogee Coater and Hot Plate – Centre for Microscopy and Microanalysis – University of Queensland

How Cee® equipment is used

The CMM process description pairs an Apogee® coater with a hotplate for photoresist preparation. The recorded source does not specify the individual module sizes.

Equipment reported

Apogee coater and hotplate

Source type

Facility process reference

Publication year

Not recorded

Materials

Photoresist

Substrate

Not reported

Source

University of Queensland

Process context

This is a facility equipment reference. It documents the listed capability rather than a particular research result. Confirm current access, training, and operating procedures with the facility. Materials recorded for this reference include Photoresist.