Integration Labs Lithography

How Cee® equipment is used

CINT's lithography description identifies a Cee® 1000 hotplate. The source connects the tool to lithography processing at the Los Alamos and Sandia user facility.

Equipment reported

Cee 1000

Source type

National-lab process reference

Publication year

Not recorded

Materials

Not reported

Substrate

Not reported

Source

Center for Integrated Nanotechnologies, Los Alamos and Sandia

Process context

The process details describe the cited work. Reported recipes and results depend on the authors’ materials, substrates, and equipment configuration.