Patent

Minimal invasive electrocorticographic brain-computer interface

The patent reports photoresist prebaking for minimally invasive electrocorticographic interfaces.

How Cee® equipment is used

The patent's fabrication description identifies an Apogee® bake plate for photoresist prebaking. The application is an electrocorticographic brain-computer interface; an exact bake-plate size is not inferred.

Equipment reported
Apogee bake plate
Source type
Patent experimental example
Publication year
Not recorded
Materials
Photoresist
Substrate
Not reported
Source
Justia Patents

Process context

This entry describes a patent example. Consult the original document for the experimental procedure and the scope of its claims. Materials recorded for this reference include Photoresist.

Source and equipment evidence

Justia Patents. Minimal invasive electrocorticographic brain-computer interface.

Open original source ↗

Application summary prepared by Cee. The original source remains the authority for its methods and findings.

SEMICON EUROPA · 10–13 NOVEMBER

Bring your process questions.

Meet Jacob, CEE’s Global Sales Director, in Munich with our partner SiSTEM Technology.

Stand C1353 · Messe München
Spin coating, bake and chill, temporary bonding and debonding.

Book a stand meeting →

Mention Jacob from CEE in SiSTEM’s booking form.