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SOP / protocol

CEE Spinner/Hotplate Operation – UAH

This procedure describes spin coating and baking at University of Alabama in Huntsville.

How Cee® equipment is used

The operating procedure covers the legacy Cee® spinner/hotplate identified as 100CB or CB100 in the source. It describes coating and bake operation at UAH.

Equipment reported
Cee 100CB / CB100 source wording
Source type
SOP
Publication year
Not recorded
Materials
Photoresist
Substrate
Not reported
Source
University of Alabama in Huntsville

Process context

This procedure describes the source facility’s installation. Its recipes, operating limits, and training requirements apply to that installation; consult the original procedure before use. Materials recorded for this reference include Photoresist.

Source and equipment evidence

University of Alabama in Huntsville. CEE Spinner/Hotplate Operation – UAH.

Open original source ↗

Application summary prepared by Cee. The original source remains the authority for its methods and findings.

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Spin coating, bake and chill, temporary bonding and debonding.

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