Methods of producing structures using a developer-soluble layer with multilayer technology

How Cee® equipment is used

Brewer Science's patent examples identify a Cee® 200CB for coat-bake processing and a Cee® 200FX Developer fitted with a Prosys megasonic transducer for development. The examples investigate multilayer patterning with a developer-soluble layer.

Equipment reported

Cee 200CB; Cee 200FX Developer with Prosys megasonic transducer

Source type

Patent experimental example

Publication year

Not recorded

Materials

Developer, Photoresist

Substrate

Not reported

Source

Brewer Science — Published Patent Examples

Process context

This entry describes a patent example. Consult the original document for the experimental procedure and the scope of its claims. Materials recorded for this reference include Developer, Photoresist.