Cee® 200X and 200X-F Spin Coaters – MIT Fabtools Listing

MIT Fabtools
Cee® 200X (Legacy)
Wafer Size: Not Specified
Substrate Type: Not Specified
MIT’s Fabtools listing explicitly references Cee® 200X-F and Cee® 200X spin coaters within its shared nanofabrication tool set. The indexed listing associates these systems with Spinner-EBL, Spinner-Polymer, and Photo / Coat usage categories.
Publication Year: Unknown

Process Overview

The MIT Fabtools page is JavaScript-gated in the live browser view, but the indexed search snippet explicitly exposes two Cee® platforms: Cee® 200X-F and Cee® 200X. Those same indexed results also tie the tools to Spinner-EBL, Spinner-Polymer, and Photo / Coat, making this a useful university facility reference for Cee® equipment in shared lithography and coating workflows. Because the live page does not render without JavaScript in this environment, additional details such as materials, wafer size, and fuller tool descriptions should be left unspecified unless you verify them directly on the site.

Related Research

Off-Stoichiometry Thiol–Ene Polymers: Inclusion of Anchor Groups Using Allylsilanes

This paper develops OSTE-AS polymers for bonding and integration with silicon wafers and explicitly states that the OSTE-AS prepolymers were deposited on silicon wafers using a Cee® Apogee® Spin Coater module of an X-Pro II Workstation. The paper also reports 100 mm silicon wafers and gives resulting film thicknesses of 12.9 µm, 4.9 µm, and 3.4 µm at 1000, 3000, and 5000 rpm, respectively.

Omnidirectional Circularly Polarized Thermal Radiation Enabled by Chiral Metasurface

This paper describes fabrication of a chiral metasurface for circularly polarized thermal radiation and includes use of a Cee® Apogee® Spin Coater and Cee® Apogee® Bake Plate in the sample preparation flow, including spin coating of PMMA 950 K A4.

Microfluidic Bioelectrochemical Cell Platform for the Study of Extracellular Electron Uptake in Microbes

This preprint describes fabrication of a glass-based microfluidic bioelectrochemical cell platform and explicitly states that KL8020 HMDS Spin-On Primer was spin coated on 100 mm borosilicate glass wafers using an Apogee® Spin Coater. The broader lithography flow also includes spin-coated LOR 10B, Microposit™ S1805™, AZ P4620, and SU-8 2100.