Microfluidic Bioelectrochemical Cell Platform for the Study of Extracellular Electron Uptake in Microbes

Spin Coater
Materials: AZ4620, HMDS, LOR10B, PDMS, Photoresist, S1805, SU-8

Preprints.org

Apogee® 200 Spin Coater

Wafer Size: 100mm

Substrate Type: Borosilicate Glass

This preprint describes fabrication of a glass-based microfluidic bioelectrochemical cell platform and explicitly states that KL8020 HMDS Spin-On Primer was spin coated on 100 mm borosilicate glass wafers using an Apogee® Spin Coater. The broader lithography flow also includes spin-coated LOR 10B, Microposit™ S1805™, AZ P4620, and SU-8 2100.

Publication Year: 2025

Process Overview

This work presents a scalable glass-based microfluidic bioelectrochemical cell platform for studying extracellular electron uptake in microbes. In the electrode array lithography flow, the paper states that fabrication was carried out on 100 mm diameter, 500 µm thick borosilicate glass wafers. Before lithography, a layer of KL8020 HMDS Spin-On Primer was applied using an Apogee® Spin Coater and soft baked at 115 °C for 3 minutes to promote photoresist adhesion. The process then used sequential spin coating of LOR 10B and Microposit™ S1805™ to defined film thicknesses for the electrode patterning sequence. The paper also describes use of AZ P4620 photoresist during pseudoreference electrode chlorination and SU-8 2100 photoresist spun to 100 µm thickness to form a replica mold for PDMS channel fabrication. Together, those details make this a strong reference for Apogee® use in university microfabrication with clearly stated materials, substrate type, and wafer size.

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