Cyclic olefin polymer compositions and polysiloxane release layers for use in temporary wafer bonding processes

How Cee® equipment is used

Brewer Science's patent examples identify a Cee® 200FX for cleaning adhesive residues after temporary-wafer release. The examples also name a Brewer Science peel debonder, without establishing an Apogee® debonder model.

Equipment reported

Cee 200FX; Brewer Science peel debonder

Source type

Patent experimental example

Publication year

2018

Materials

Cyclic olefin polymer

Substrate

Not reported

Source

Brewer Science — Published Patent Examples

Process context

This entry describes a patent example. Consult the original document for the experimental procedure and the scope of its claims. Materials recorded for this reference include Cyclic olefin polymer.