Paper / report

Polymer-metal coating for high contrast SEM cross sections at the deep nanoscale

The study reports polymer films for high-contrast cross-sectional SEM.

How Cee® equipment is used

The method identifies a Cee® 100FX for polymer-film application. The polymer-metal coating is used to improve contrast in scanning-electron-microscope cross sections.

Equipment reported
Cee 100FX
Source type
Research paper
Publication year
Not recorded
Materials
Not reported
Substrate
Not reported
Source
Royal Society of Chemistry

Process context

The process details describe the cited work. Reported recipes and results depend on the authors’ materials, substrates, and equipment configuration.

Source and equipment evidence

Royal Society of Chemistry. Polymer-metal coating for high contrast SEM cross sections at the deep nanoscale.

Open original source ↗

Application summary prepared by Cee. The original source remains the authority for its methods and findings.

SEMICON EUROPA · 10–13 NOVEMBER

Bring your process questions.

Meet Jacob, CEE’s Global Sales Director, in Munich with our partner SiSTEM Technology.

Stand C1353 · Messe München
Spin coating, bake and chill, temporary bonding and debonding.

Book a stand meeting →

Mention Jacob from CEE in SiSTEM’s booking form.