Spin Coating – University of Houston NanoFabrication Facility

University of Houston NanoFabrication Facility (UHNF)
Cee® 200X (Legacy)
Wafer Size: Not Specified
Substrate Type: Not Specified
The University of Houston NanoFabrication Facility lists a Cee® Spin Coater for thin film and photoresist coating, supporting a range of lithography and polymer deposition processes within an open-access cleanroom environment.
Publication Year: Unknown

Process Overview

This University of Houston NanoFabrication Facility page describes spin coating as a standard process used to deposit uniform thin films across substrates. The process is explicitly tied to use of a Cee® Spin Coater, where liquid materials such as photoresist and polymer solutions are dispensed onto the substrate and spread via controlled rotation to achieve uniform coatings. The page explains that coating thickness is governed by parameters such as spin speed, viscosity, and solution concentration, reinforcing the role of controlled spin coating in lithography preparation and thin film applications. While the page focuses on process fundamentals, it clearly anchors those steps to the Cee® Spin Coater, making this a solid facility-level reference for real-world use of Cee® coating equipment in university nanofabrication workflows.

Related Research

Off-Stoichiometry Thiol–Ene Polymers: Inclusion of Anchor Groups Using Allylsilanes

This paper develops OSTE-AS polymers for bonding and integration with silicon wafers and explicitly states that the OSTE-AS prepolymers were deposited on silicon wafers using a Cee® Apogee® Spin Coater module of an X-Pro II Workstation. The paper also reports 100 mm silicon wafers and gives resulting film thicknesses of 12.9 µm, 4.9 µm, and 3.4 µm at 1000, 3000, and 5000 rpm, respectively.

Omnidirectional Circularly Polarized Thermal Radiation Enabled by Chiral Metasurface

This paper describes fabrication of a chiral metasurface for circularly polarized thermal radiation and includes use of a Cee® Apogee® Spin Coater and Cee® Apogee® Bake Plate in the sample preparation flow, including spin coating of PMMA 950 K A4.

Microfluidic Bioelectrochemical Cell Platform for the Study of Extracellular Electron Uptake in Microbes

This preprint describes fabrication of a glass-based microfluidic bioelectrochemical cell platform and explicitly states that KL8020 HMDS Spin-On Primer was spin coated on 100 mm borosilicate glass wafers using an Apogee® Spin Coater. The broader lithography flow also includes spin-coated LOR 10B, Microposit™ S1805™, AZ P4620, and SU-8 2100.