Flat-panel Pixel Electrospray Thrusters for Increased Reliability and Efficiency: Preliminary Design and Testing

Spin Coater
Microfabrication
Materials: SU-8

International Electric Propulsion Conference

Apogee® 200 Spin Coater

Wafer Size: Not Specified

Substrate Type: Glass, Silicon Dioxide Porous Glass

This conference paper describes fabrication of porous-glass electrospray thrusters and explicitly states that SU-8 2005 was spun using a Cee® Apogee® manual spin coater.

Publication Year: 2024

Process Overview

The study used silicon dioxide porous glass substrates preloaded with fluorene so photoresist would stay on the surface. SU-8 2005 was spin coated with a Cee® Apogee® Spin Coater, then exposed, developed in PGMEA, and rinsed with IPA. AZnLOF-2020 was later used as a lift-off layer, and the SU-8 was hard-baked at 105 °C for 2 h before PTFE sputtering.

View Full Publication

Related Research

Off-Stoichiometry Thiol–Ene Polymers: Inclusion of Anchor Groups Using Allylsilanes

Spin Coater
Bio, Microfluidics
Materials: OSTE-AS Polymer

This paper develops OSTE-AS polymers for bonding and integration with silicon wafers and explicitly states that the OSTE-AS prepolymers were deposited on silicon wafers using a Cee® Apogee® Spin Coater module of an X-Pro II Workstation. The paper also reports 100 mm silicon wafers and gives resulting film thicknesses of 12.9 µm, 4.9 µm, and 3.4 µm at 1000, 3000, and 5000 rpm, respectively.

Omnidirectional Circularly Polarized Thermal Radiation Enabled by Chiral Metasurface

Bake Plate, Spin Coater
Sensor
Materials: Photoresist, PMMA

This paper describes fabrication of a chiral metasurface for circularly polarized thermal radiation and includes use of a Cee® Apogee® Spin Coater and Cee® Apogee® Bake Plate in the sample preparation flow, including spin coating of PMMA 950 K A4.

Microfluidic Bioelectrochemical Cell Platform for the Study of Extracellular Electron Uptake in Microbes

Spin Coater
Materials: AZ4620, HMDS, LOR10B, PDMS, Photoresist, S1805, SU-8

This preprint describes fabrication of a glass-based microfluidic bioelectrochemical cell platform and explicitly states that KL8020 HMDS Spin-On Primer was spin coated on 100 mm borosilicate glass wafers using an Apogee® Spin Coater. The broader lithography flow also includes spin-coated LOR 10B, Microposit™ S1805™, AZ P4620, and SU-8 2100.