Design of microscale devices for the detection of melanocytic growths in the skin

Spin Coater
Bio Sensing Devices
Materials: OmniCoat, SU-8

University of Queensland

Apogee® 200 Spin Coater

Wafer Size: Not Specified

Substrate Type: Not Specified

This thesis covers microscale device development for detection of melanocytic growths in the skin. In the accessible snippet from the thesis PDF, a silicon wafer is coated with OmniCoat and SU-8 3025 photoresist, and the process explicitly references use of a CEE spin coater.

Publication Year: 2019

Process Overview

Based on the accessible thesis snippets, this work includes microfabrication steps for skin-diagnostic microscale devices using a silicon wafer substrate. One explicitly exposed process sequence states that the wafer backside was coated with OmniCoat and SU-8 3025 photoresist in preparation for creating deep bores. Another snippet explicitly names a CEE spin coater, followed by alignment under a chrome mask with 50 um circular dots and UV exposure at 160 mJ/cm2. That makes this a useful university thesis reference tying a named CEE coating step to SU-8-based device fabrication.

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