Spin Coating – University of Kentucky CeNSE

Spin Coater
Materials: Photoresist

University of Kentucky Center for Nanoscale Science and Engineering (CeNSE)

Cee® 100 (Legacy)

Wafer Size: Not Specified

Substrate Type: Not Specified

The University of Kentucky CeNSE spin coating page explicitly references the Cee® Model 100 and 150 and describes them as part of the facility’s spin coating capability for thin-film application.

Publication Year: Unknown

Process Overview

his University of Kentucky CeNSE page describes spin coating as a process for applying thin films and explicitly identifies the Cee® Model 100 and 150. The page states that the system incorporates a stainless steel spin bowl, PTFE drain and exhaust connections, a hardened alloy steel spindle, a toothed belt drive, a servo motor, and an integral optical encoder for closed-loop digital motor control. It also explains that each program on a Cee® Spin Coater may contain up to ten separate process steps, supporting more complex coating requirements when needed.

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