Cee® Apogee Spin Coater – Washington Nanofabrication Facility

Spin Coater
Nanofabrication, Open Facitlity
Materials: Unknown

Washington Nanofabrication Facility, University of Washington

Apogee® 200 Spin Coater

Wafer Size: Not Specified

Substrate Type: Not Specified

The Washington Nanofabrication Facility tool list explicitly includes a Cee® Apogee Spin Coater within its Lithography and Direct Patterning area.

Publication Year: Unknown

Process Overview

The Washington Nanofabrication Facility lists a Cee® Apogee Spin Coater as part of its open-access cleanroom tool set. The tool is identified on the facility list with Coral ID WNF–SPIN5 and is categorized under Lithography and Direct Patterning, making it a clear university facility reference for Cee® equipment in shared nanofabrication use. The available source snippet does not expose additional details such as materials, wafer size, or linked bake/develop tools, so those should be left unspecified for this entry.

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