Paper / report

Microelectrode Arrays for Electrochemical Cycling of Individual Battery Particles

The study reports LOR/S1813 lithography for individual battery-particle microelectrode arrays.

How Cee® equipment is used

The electrode-array fabrication method identifies an Apogee® spinner for LOR and S1813 resist processing. The arrays enable electrochemical cycling of individual battery particles.

Equipment reported
Apogee spinner
Source type
Research paper
Publication year
Not recorded
Materials
S1813
Substrate
Not reported
Source
ACS Publications

Process context

The process details describe the cited work. Reported recipes and results depend on the authors’ materials, substrates, and equipment configuration. Materials recorded for this reference include S1813.

Source and equipment evidence

ACS Publications. Microelectrode Arrays for Electrochemical Cycling of Individual Battery Particles.

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Application summary prepared by Cee. The original source remains the authority for its methods and findings.

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