Document Library

Find manuals, documents, drawings, and technical files by equipment or file type.

The Cee® Document Library provides access to manuals, CAD files, and technical documentation for spin coaters, bake plates, bonders, and supporting wafer processing equipment.

This includes both current Apogee® platforms and legacy Cee® systems still in operation worldwide.

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Equipment

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Sample EBR Connection

Accessories, Dispenses

Sample N2 Blowoff Connection

Accessories, Dispenses

Sample Pressure Can Connection

Accessories, Dispenses

Sample Cartridge Connection

Accessories, Dispenses

Sample DSD Connection

Accessories, Dispenses

Cee® BSR Datasheet

Accessories, Dispenses

Cee® EBR Datasheet

Accessories, Dispenses

Cee® Disposable Syringe Dispense Datasheet

Accessories, Dispenses

Cee® Cartridge Stream Dispense Datasheet

Accessories, Dispenses

Cee® Pressure Can Stream Dispense Datasheet

Accessories, Dispenses

Cee® N2 Blowoff Datasheet

cbw2-certificate_c4e4b94e-20240606151240_signed (002)

Apogee® 200 Bake Plate, Apogee® 300 Bake Plate, Bake Plate

DataStream™ v6.8 Software Operations Manual

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Apogee® Bonder, Apogee® Mechanical Debonder, Apogee® Thermal Slide Debonder, Bake Plate, Bonder, Debonder, Spin Coater, Spin Developer

Apogee® 300 Bake Plate Manual

Apogee® Bonder, Bonder

AccuScan Dispense Operations Manual

Accessories, Dispenses

Cee® Spray Dispense Datasheet

AccuScan Datasheet

U8 125057 0002 Rev 00

Full Size X-Pro II Workstation, Half Size X-Pro II Workstation, X-Pro II Workstation

EC Declaration of Conformity WS 24

1300CSX, Apogee® Bonder, Bonder, Debonder

Datastream v6.10.1 Update Checklist

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Apogee® Bonder, Apogee® Mechanical Debonder, Apogee® Thermal Slide Debonder, Bake Plate, Bonder, Debonder, Spin Coater, Spin Developer

DataStream™ v6.9 Software Operations Manual

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Apogee® Bonder, Apogee® Mechanical Debonder, Apogee® Thermal Slide Debonder, Bake Plate, Bonder, Debonder, Spin Coater, Spin Developer

DataStream™ Software Operations Manual

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Apogee® Bonder, Apogee® Mechanical Debonder, Apogee® Thermal Slide Debonder, Bake Plate, Bonder, Debonder, Spin Coater, Spin Developer

Apogee® 200 Flange Bake Plate Manual

Apogee® 200 Bake Plate, Bake Plate

Apogee® 200 Bake Plate Manual

Apogee® 200 Bake Plate, Bake Plate

Explore Equipment Platforms

Learn more about each equipment platform, including system capabilities, configuration options, and typical process applications.

Workstations

Spin Coaters

Bake Plates

Developers

Bonders/ Debonders

Custom

Additional Resources

Explore application insights, system selection guidance, and process fundamentals to better understand equipment capabilities and optimize your workflow.