Document Library

Find manuals, documents, drawings, and technical files by equipment or file type.

The Cee® Document Library provides access to manuals, CAD files, and technical documentation for spin coaters, bake plates, bonders, and supporting wafer processing equipment.

This includes both current Apogee® platforms and legacy Cee® systems still in operation worldwide.

Refine Results

Document Type

Equipment

File Extension

Apogee 450 Spin Coater

Apogee 450 Developer Datasheet

Apogee® 200 Spin Coater Datasheet

Apogee® 200 Spin Coater, Spin Coater

Apogee® 200 Developer Datasheet

Apogee® 200 Developer, Spin Developer

U8 125057 0004_TB_TSB_

Apogee® Bonder, Apogee® Thermal Slide Debonder, Bonder, Debonder

U8 125057 0005_d-B-Sgx-X

Apogee® 200 Spin Coater, Spin Coater

U8 125057 0002 Rev.01_XPRO_A-MD

Apogee® Mechanical Debonder, Debonder, Full Size X-Pro II Workstation, Half Size X-Pro II Workstation, X-Pro II Workstation

U10 125057 0006 Rev.00

Apogee® 200 Spin Coater, Apogee® 450 Spin Coater, Spin Coater

U10 1256057 0007 Rev.00_A-b-Bddu-x

Apogee® 200 Bake Plate, Apogee® 300 Bake Plate, Bake Plate

Explore Equipment Platforms

Learn more about each equipment platform, including system capabilities, configuration options, and typical process applications.

Workstations

Spin Coaters

Bake Plates

Developers

Bonders/ Debonders

Custom

Additional Resources

Explore application insights, system selection guidance, and process fundamentals to better understand equipment capabilities and optimize your workflow.