Document Library

Find manuals, documents, drawings, and technical files by equipment or file type.

The Cee® Document Library provides access to manuals, CAD files, and technical documentation for spin coaters, bake plates, bonders, and supporting wafer processing equipment.

This includes both current Apogee® platforms and legacy Cee® systems still in operation worldwide.

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a-f-b3_lid_open

a-f-b3_lid_closed

a-f-b3_lid_closed

Apogee® Flange Mount 300 Bake Plate-Lid Open (PDF)

X-Pro II Half Size Workstation, FFU, Doors and Sash Open (STEP)

X-Pro II Half Size Workstation, FFU, Doors and Sash Open (PDF)

X-Pro II Half Size Workstation, Ducted Exhaust, Doors and Sash Open (STEP)

X-Pro II Half Size Workstation, Ductless Recirculation, Doors and Sash Open (PDF)

X-Pro II Half Size Workstation, Ducted Exhaust, Doors and Sash Closed (PDF)

XPROII-2-DE_Doors_and_Sash_Closed

XPROII-2-DR_Doors_and_Sash_Open

XPROII-2-DR_Doors_and_Sash_Open

XPROII-2-DR_Doors_and_Sash_Closed

XPROII-2-DR_Doors_and_Sash_Closed

XPROII-2-FFU_Doors_and_Sash_Closed

XPROII-2-FFU_Doors_and_Sash_Closed

XPROII-4-DR_Doors_and_Sash_Open

XPROII-4-DR_Doors_and_Sash_Open

XPROII-4-DE_Doors_and_Sash_Open

XPROII-4-DE_Doors_and_Sash_Closed

XPROII-4-DE_Doors_and_Sash_Closed

XPROII-4-FFU_Doors_and_Sash_Open

X-Pro II Full Size Workstation, FFU, Doors and Sash Open (STEP)

X-Pro II Full Size Workstation, FFU, Doors and Sash Closed (STEP)

Explore Equipment Platforms

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Additional Resources

Explore application insights, system selection guidance, and process fundamentals to better understand equipment capabilities and optimize your workflow.