Document Library

Find manuals, documents, drawings, and technical files by equipment or file type.

The Cee® Document Library provides access to manuals, CAD files, and technical documentation for spin coaters, bake plates, bonders, and supporting wafer processing equipment.

This includes both current Apogee® platforms and legacy Cee® systems still in operation worldwide.

Refine Results

Document Type

Equipment

File Extension

Captive Spin Chucks Datasheet

Accessories

DataStream™ v20220620 Software Operations Manual

DataStream Manual

DataStream™ v6.3 Software Operations Manual

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Apogee® Bonder, Apogee® Mechanical Debonder, Apogee® Thermal Slide Debonder, Bonder

DataStream™ v6.4 Software Operations Manual

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Apogee® Bonder, Apogee® Mechanical Debonder, Apogee® Thermal Slide Debonder, Bonder

Datastream v6 Update Checklist

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Apogee® Bonder, Apogee® Mechanical Debonder, Apogee® Thermal Slide Debonder, Bonder

X-Pro II Utilities

DataStream™ v6.4.1 Software Operations Manual

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Apogee® Bonder, Apogee® Mechanical Debonder, Apogee® Thermal Slide Debonder, Bonder, Spin Coater

Apogee® Mechanical Debonder Operations Manual

Apogee® Mechanical Debonder, Debonder

X-Pro II Workstation Product Flyer

X-Pro II Workstation

Automated Dispense Product Flyer

Accessories

X-Pro II Workstation Configurations

Full Size X-Pro II Workstation, Half Size X-Pro II Workstation, X-Pro II Workstation

Bond/Debond Flyer

1300CSX, Apogee® Bonder, Apogee® Thermal Slide Debonder, Bonder, Debonder

Standard Process Modules Flyer

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Bake Plate, Spin Coater, Spin Developer

DataStream™ v6.7 Software Operations Manual

Apogee® 200 Bake Plate, Apogee® 200 Developer, Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® Bonder, Apogee® Mechanical Debonder, Apogee® Thermal Slide Debonder, Bake Plate, Bonder, Debonder, Spin Coater

Apogee® 200 Bake Plate Utilities

Apogee® 200 Bake Plate, Bake Plate

Apogee® 300 Bake Plate Utilities

Apogee® 300 Bake Plate, Bake Plate

ATM for Report 105349733COL-001

Apogee® 200 Developer, Apogee® 200 Spin Coater, Apogee® 450 Developer, Apogee® 450 Spin Coater, Spin Coater, Spin Developer

ATM for Report 105455066DAL-001 (2)

EC Declaration of Conformity WS 24

Apogee® Mechanical Debonder, Debonder, Full Size X-Pro II Workstation, Half Size X-Pro II Workstation, X-Pro II Workstation

EC Declaration of Conformity PM 24

Apogee® 300 Bake Plate, Apogee® 450 Developer, Apogee® 450 Spin Coater, Bake Plate, Spin Coater, Spin Developer

Apogee Dispense Manual

Accessories, Dispenses

DSD Operation Manual

Accessories, Dispenses

Sample BSR Connection

Accessories, Dispenses

Explore Equipment Platforms

Learn more about each equipment platform, including system capabilities, configuration options, and typical process applications.

Workstations

Spin Coaters

Bake Plates

Developers

Bonders/ Debonders

Custom

Additional Resources

Explore application insights, system selection guidance, and process fundamentals to better understand equipment capabilities and optimize your workflow.