Document Library

Find manuals, documents, drawings, and technical files by equipment or file type.

The Cee® Document Library provides access to manuals, CAD files, and technical documentation for spin coaters, bake plates, bonders, and supporting wafer processing equipment.

This includes both current Apogee® platforms and legacy Cee® systems still in operation worldwide.

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Apogee® 200 Developer Utilities

1300CSX Slide Debonder Utilities

Apogee Bonder Utilities

Apogee Bonder Datasheet (Rev A)

1300CSX Datasheet

Apogee® 300 Bake Plate Flange Mount Cutout Rev A

Apogee® 450 Flange Developer Mount Cutout Rev A

Apogee® 450 Developer Utilities Rev A

Apogee® 450 Flange Mount Cutout Rev A

Apogee® 450 Spin Coater Utlitlies Rev A

Chuck Sizing

Recessed Spin Chuck Manual

Porous Chuck Manual

Film Frame Chuck Manual

Circular Spin Chuck Manual

Chemical Compatability

Centering Device Manual

Spin Chuck Questionaire

Spin Chuck Sets

Spin Chuck Manual

Circular Spin Chucks Datasheet

Film Frame Chucks Datasheet

Porous Ceramic Chucks Datasheet

Recessed Spin Chucks Datasheet

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Additional Resources

Explore application insights, system selection guidance, and process fundamentals to better understand equipment capabilities and optimize your workflow.