Document Library

Find manuals, documents, drawings, and technical files by equipment or file type.

The Cee® Document Library provides access to manuals, CAD files, and technical documentation for spin coaters, bake plates, bonders, and supporting wafer processing equipment.

This includes both current Apogee® platforms and legacy Cee® systems still in operation worldwide.

Refine Results

Document Type

Equipment

File Extension

Apogee® Flange Mount 450 Spin Coater – Drawing (DXF)

Apogee® 450 Spin Coater, Spin Coater

Apogee® Flange Mount 450 Spin Coater – Drawing (PDF)

Apogee® 450 Spin Coater, Spin Coater

Apogee® Flange Mount 450 Spin Coater – Drawing (DWG)

Apogee® 450 Spin Coater, Spin Coater

Apogee® Benchtop 200 Spin Developer – Drawing (DXF)

Apogee® 200 Developer, Spin Developer

Apogee® Benchtop 200 Spin Developer – Drawing (PDF)

Apogee® 200 Developer, Spin Developer

Apogee® Benchtop 200 Spin Developer – Drawing (DWG)

Apogee® 200 Developer, Spin Developer

Apogee® Flange Mount 200 Spin Developer – Drawing (PDF)

Apogee® 200 Developer, Spin Developer

Apogee® Flange Mount 200 Spin Developer – Drawing (DWG)

Apogee® 200 Developer, Spin Developer

Apogee® Flange Mount 200 Spin Developer – Drawing (DXF)

Apogee® 200 Developer, Spin Developer

Apogee 450 Developer Manual

Apogee Spin Coater Manual

Apogee Flange Developer Manual

Apogee Developer Manual

a-b-sd3_dxf

a-b-sd3_pdf

Apogee® Benchtop 450 Spin Developer – Drawing (DWG)

Apogee® 450 Spin Coater, Spin Coater

Apogee® Flange Mount 450 Spin Developer – Drawing (PDF)

Apogee® 450 Developer, Spin Developer

Apogee® Flange Mount 450 Spin Developer – Drawing (DWG)

Apogee® 450 Developer, Spin Developer

Apogee® Flange Mount 450 Spin Developer – Drawing (DXF)

Apogee® 450 Spin Coater, Spin Coater

Apogee® Benchtop 200 Bake Plate Manual

Apogee® 200 Bake Plate, Bake Plate

Apogee® 200 Bake Plate (PDF)

Apogee® 200 Bake Plate, Bake Plate

Apogee® Benchtop 200 Bake Plate – Drawing (DXF)

Apogee® 200 Bake Plate, Bake Plate

Apogee® Benchtop 200 Bake Plate – Drawing (PDF)

Apogee® 200 Bake Plate, Bake Plate

Apogee® Benchtop 200 Bake Plate – Drawing (DWG)

Apogee® 200 Bake Plate, Bake Plate

Explore Equipment Platforms

Learn more about each equipment platform, including system capabilities, configuration options, and typical process applications.

Workstations

Spin Coaters

Bake Plates

Developers

Bonders/ Debonders

Custom

Additional Resources

Explore application insights, system selection guidance, and process fundamentals to better understand equipment capabilities and optimize your workflow.