Flat-panel Pixel Electrospray Thrusters for Increased Reliability and Efficiency: Preliminary Design and Testing

Spin Coater
Microfabrication
Materials: SU-8

International Electric Propulsion Conference

Apogee® 200 Spin Coater

Wafer Size: Not Specified

Substrate Type: Glass, Silicon Dioxide Porous Glass

This conference paper describes fabrication of porous-glass electrospray thrusters and explicitly states that SU-8 2005 was spun using a Cee® Apogee® manual spin coater.

Publication Year: 2024

Process Overview

The study used silicon dioxide porous glass substrates preloaded with fluorene so photoresist would stay on the surface. SU-8 2005 was spin coated with a Cee® Apogee® Spin Coater, then exposed, developed in PGMEA, and rinsed with IPA. AZnLOF-2020 was later used as a lift-off layer, and the SU-8 was hard-baked at 105 °C for 2 h before PTFE sputtering.

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