Spin Coating – University of Houston NanoFabrication Facility

Unknown
Positive Photoresist
Spin Coater, 200mm Spin Coater, 200X (Legacy)
Source:University of Houston NanoFabrication Facility (UHNF)
Material: Positive Photoresist
Source:Unknown
The University of Houston NanoFabrication Facility lists a Cee® Spin Coater for thin film and photoresist coating, supporting a range of lithography and polymer deposition processes within an open-access cleanroom environment.
Publication Year: Unknown

Process Overview

This University of Houston NanoFabrication Facility page describes spin coating as a standard process used to deposit uniform thin films across substrates. The process is explicitly tied to use of a Cee® Spin Coater, where liquid materials such as photoresist and polymer solutions are dispensed onto the substrate and spread via controlled rotation to achieve uniform coatings. The page explains that coating thickness is governed by parameters such as spin speed, viscosity, and solution concentration, reinforcing the role of controlled spin coating in lithography preparation and thin film applications. While the page focuses on process fundamentals, it clearly anchors those steps to the Cee® Spin Coater, making this a solid facility-level reference for real-world use of Cee® coating equipment in university nanofabrication workflows.

Related Research

Tools – BioNIUM Nanofabrication Facility

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Unknown
Spin Coater, 200mm Spin Coater, 200X (Legacy)
The University of Miami BioNIUM nanofabrication facility tool listing explicitly includes a Cee® 200X Precision Spin Coater as part of its lithography-related equipment set.

Direct Photopatterning of Metal Oxide Structures Using Photosensitive Metallorganics

4 inch
MIBK
Spin Coater, 200mm Spin Coater, 100 (Legacy)
This Georgia Tech paper describes direct photopatterning of mixed-metal oxide films using a photosensitive metallorganic precursor. The precursor films were spin coated onto 100 mm single-side polished silicon wafers using a Cee® Model 100 CB Spin Coater and Bake Unit

Cee® Spin Coater & Baking Tools – University of Kansas Nanofabrication Facility

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Unknown
Spin Coater, 200mm Spin Coater, 200X (Legacy), Bake Plates, Apogee® 200 Bake Plate, 1300X (Legacy)
The University of Kansas Nanofabrication Facility lists a Cee® coat and bake workflow that includes a Cee® 200CBX Programmable Spin Coater, Cee® 1300X Hot Plate, and Cee® Apogee® Hot Plate. The page also states that the 200CBX supports multiple chuck sizes for a variety of substrate sizes.