Apogee® Temporary Bonding Suite

Implement bonding and debonding processes faster with proven tools and trusted expertise.

What Is Temporary Bonding—and Why Does It Matter?

Temporary bonding is essential in modern semiconductor manufacturing, especially as devices have become thinner, more complex, and more fragile. This process is used to protect and support wafers during critical steps like thinning, backside processing, and advanced packaging. 

A device wafer is temporarily attached to a carrier wafer using a removable adhesive. The bonded pair allows the device wafer to be thinned and processed safely without damaging, warping, or breaking. After processing is complete, the wafers are separated, or “debonded”using thermal or mechanical methods depending on the adhesive and process requirements.

Temporary bonding ensures high yields, safe handling, and access to advanced packaging techniques that would otherwise be too risky or impossible.

Cee Apogee Wafer Spin Coater Icon

Coat

Coat

Adhesive is applied using a spin coater.
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Cee Apogee Wafer Bake Plate, Hot Plate Icon

Bake

Bake

Adhesive is cured using a bake plate.
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Wafer Bond Icon

Bond

Bond

Device and carrier wafer are joined using a bonder.
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Process

Process

Downstream steps that may include thinning, backside processing, and advanced packaging.
Apogee Wafer Debonding Icon

Debond

Debond

Separate the device wafer from the carrier wafer.
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Cee Wafer Developer and Cleaner Icon

Clean

Clean

Adhesive is removed from device and carrier using a spin developer.
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Innovate

Your Process | Our Platform

Advanced processes require advanced technology. Cee® equipment is tailored for lab-scale development and production, supporting a wide range of substrates and adhesive types.

Purpose-built for your next-gen solutions.  

Choose Your Method...

... Master Your Process.

Start to Finish

And Everything in Between

Whether you’re new to temporary bonding or have it all figured out, Cee® supports every step. From adhesive selection to substrate compatibility and best-known methods, implement your process with confidence from day one.

Premium Experience

Engineered for superior performance, usability, versatility—and peace of mind.

Thin, Brittle, Exotic

Yes, That Too...

Got GaAs? …or GaN, InP, sapphire, SiC diamond, metal foils, glass, silicon, or something else? Cee® bonding and debonding solutions handle the thin, fragile, weird stuff no one wants to break (and we make it look easy).

DataStream™ OS

- Included on every Apogee® Bonder and Debonder

Knowledge is power. With DataStream™ technology, monitor and manage in real time, ensuring production-quality results from anywhere. Proactive warnings and detailed log files give you the information you need to succeed.

Unlimited Recipes, Unlimited Steps

Create and store unlimited recipes with unlimited steps. Use pre-defined commands to streamline your setup and execution.

Record Everything

Process parameters and measurements are logged in real-time. Export in multiple formats for analysis, troubleshooting, and process optimization.

Remote Access and Managment

Access your Apogee® equipment remotely via any web browser for real-time monitoring, adjustments, and recipe management. Create, modify, upload, download, and archive recipes seamlessly.

Monitor All the Things

DataStream™ technology monitors key parameters to ensure precise control for optimal results.

Safety

Leading the Charge

NRTL certification is crucial for semiconductor equipment, ensuring compliance with safety standards set by regulatory bodies like OSHA and ANSI.

Cee® Bonders and Debonders are NRTL listed right out of the box…

…your safety department is going to love you.

About Us

Leading the industry in high performance wafer-processing equipment since 1987.
An operator holding a patterned silicon wafer.