Recessed Spin Chucks

When working with square or rectangular substrates, customers often struggle to eliminate edge buildup (nonuniformity)
associated with uneven film drying in the corner regions. Each recessed spin chuck is custom-made to
house the exact dimensions and thickness of the customer’s square or rectangular substrate. The recessed cavity
provides an auto-centering function and provides both lateral and vacuum grip. This design emulates a round
wafer by removing the leading edge of the square and thereby dissipating the normal turbulence created in the
spin bowl atmosphere. This design virtually eliminates edge interference bands. Additional distinct advantages
of this design include complete backside coverage and mitigation of potential rear side contamination. CEE®
equipment is uniquely capable of combining recessed chuck technology, high accelerations, and multiple spin
speeds to virtually eliminate edge effect issues.