The Cee® Co-Pro™ Hybrid Workstation takes everything you love about the X-Pro II Workstation and adds the next step: collaborative automation.
Open the sash to run in manual mode while you dial in your processes. Optimize the recipes. Enjoy hands-on processing when R&D demands it. Then, when you’re ready to scale, load a cassette and let the cobot take it from there. Move from process development to repeatable automated runs without jumping straight into a full track system.
Access + Automation All in one.
Up to four 200mm coat, bake, or develop modules
Drawer: 6.8 ft² (0.637m²)
Side Compartments: 6.8 ft² (0.637m²)
208-230 VAC, 50/60Hz, 1 Phase
4″ OD, 0.4″ H2O 20cfm (100Pa @ 34CMH)
26.2A (max)
8″ OD, 0.4″ H2O 540cfm (100Pa @ 917 CMH)
1/4″ Push to Connect, <20″ Hg (33kPa abs)
1/4″ Push to Connect, 70psi (482kPa)
Refer to each module’s utilities for addition exhaust and drain requirements
The Cee® Co-Pro™ Hybrid Workstation is designed for teams that need more repeatability, less manual handling, and a smarter way to connect process steps, without giving up the flexibility that makes Cee® equipment useful for real-world development work.
Co-Pro™ brings robot-assisted automation to wafer processing workflows in a compact workstation format. It helps reduce operator touchpoints, improve process consistency, and support a more controlled flow between Cee® process equipment.
Automate 200 mm cassette-based wafer workflows, then switch back to manual processing when the job calls for it. Co-Pro™ supports the flexibility to process wafers, pieces, smaller substrates, and specialty samples using the same Cee® equipment.
Co-Pro™ helps bridge the gap between standalone equipment and larger automated systems. It gives labs, process development teams, and production environments a practical path into automation without the complexity of a full track system.
Designed with flexible configuration and Cee® equipment integration in mind, Co-Pro™ supports repeatable, programmable workflow control while preserving the hands-on adaptability needed for R&D, low-volume production, and specialty applications..
Contact Cee® to discuss early availability, configuration options, and how the Co-Pro™ Hybrid Workstation may fit your process.
With four decades of experience, our experts will collaborate closely with you to understand your requirements and deliver solutions that exceed expectations.
