Category: Spin Chucks

The Cotton Candy Effect

TL;DR Summary The cotton candy effect is a common issue in the semiconductor manufacturing process where dried material comes off the substrate in string-like filaments

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Bake Plate Process Theory

TL;DR Summary Hotplate baking is a popular technique for film drying and curing, offering advantages over traditional convection ovens such as decreased bake time, increased

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Developer Configurations

TL;DR Summary The use of immersion tank processes in photolithography has decreased due to excessive material consumption, non-uniform resolution, and poor clearing from high-aspect-ratio features.

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Spin Chucks for Thinned Substrates

TL;DR Summary Thinner and delicate substrates are commonly used in the semiconductor industry, and their safe handling requires special techniques and spin chucks. These substrates

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